Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119242 | Film processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2024-10-15 |
| 11986853 | Substrate processing apparatus, film formation unit, substrate processing method and film formation method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2024-05-21 |
| 11281108 | Exposure device | You Arisawa, Masahiko Harumoto, Yuji Tanaka, Chisayo Mori, Tomohiro MOTONO +1 more | 2022-03-22 |
| 11243469 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka | 2022-02-08 |
| 11107698 | Substrate treating method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-08-31 |
| 11004702 | Film processing unit and substrate processing apparatus | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2021-05-11 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Yasuhiro Fukumoto, Koji Kaneyama | 2021-03-23 |
| 10941492 | Substrate treating method | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-03-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-01-26 |
| 10854480 | Film processing unit, substrate processing apparatus and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2020-12-01 |
| 10832925 | Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Koji Kaneyama | 2020-11-10 |
| 10754251 | Development unit, substrate processing apparatus, development method and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2020-08-25 |
| 10591820 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Koji Kaneyama | 2020-03-17 |
| 10539877 | Developing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka, Chisayo Nakayama, You Arisawa | 2020-01-21 |
| 10444636 | Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-10-15 |
| 10401736 | Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masahiko Harumoto, Yuji Tanaka +1 more | 2019-09-03 |
| 10395942 | Etching device, substrate processing apparatus, etching method and substrate processing method | Masahiko Harumoto, Koji Kaneyama, Yuji Tanaka | 2019-08-27 |
| 10331034 | Substrate processing apparatus and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Koji Kaneyama | 2019-06-25 |
| 6053058 | Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus | Toyohide Hayashi, Hiroaki Sugimoto, Noriaki Yokono | 2000-04-25 |