Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107698 | Substrate treating method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-08-31 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Koji Kaneyama | 2021-03-23 |
| 10941492 | Substrate treating method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-03-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-01-26 |
| 10539877 | Developing method | Masahiko Harumoto, Koji Kaneyama, Masaya Asai, Yuji Tanaka, You Arisawa | 2020-01-21 |
| 10444636 | Exposure device substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto +1 more | 2019-10-15 |
| 10401736 | Exposure device, substrate processing apparatus, exposure method of substrate and substrate processing method | Tomohiro Matsuo, Yasuhiro Fukumoto, Takafumi Oki, Masaya Asai, Masahiko Harumoto +1 more | 2019-09-03 |