Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119242 | Film processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2024-10-15 |
| 12035576 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2024-07-09 |
| 11986853 | Substrate processing apparatus, film formation unit, substrate processing method and film formation method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2024-05-21 |
| 11590540 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2023-02-28 |
| 11260429 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2022-03-01 |
| 11243469 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Masaya Asai | 2022-02-08 |
| 11139192 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2021-10-05 |
| 11004702 | Film processing unit and substrate processing apparatus | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2021-05-11 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto | 2021-03-23 |
| 10854480 | Film processing unit, substrate processing apparatus and substrate processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2020-12-01 |
| 10832925 | Thermal processing device, substrate processing apparatus, thermal processing method and substrate processing method | Masahiko Harumoto, Masaya Asai, Yuji Tanaka | 2020-11-10 |
| 10754251 | Development unit, substrate processing apparatus, development method and substrate processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2020-08-25 |
| 10684548 | Developing method | Yuji Tanaka, Tadashi Miyagi, Masahiko Harumoto | 2020-06-16 |
| 10591820 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Masaya Asai, Yuji Tanaka | 2020-03-17 |
| 10539877 | Developing method | Masahiko Harumoto, Masaya Asai, Yuji Tanaka, Chisayo Nakayama, You Arisawa | 2020-01-21 |
| 10395942 | Etching device, substrate processing apparatus, etching method and substrate processing method | Masahiko Harumoto, Yuji Tanaka, Masaya Asai | 2019-08-27 |
| 10331034 | Substrate processing apparatus and substrate processing method | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2019-06-25 |
| 10185219 | Developing method | Yuji Tanaka, Tadashi Miyagi, Masahiko Harumoto | 2019-01-22 |
| 10047441 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Yukihiko Inagaki | 2018-08-14 |
| 10042262 | Negative developing method and negative developing apparatus | Tadashi Miyagi | 2018-08-07 |
| 9828676 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Yukihiko Inagaki | 2017-11-28 |
| 9477162 | Substrate processing method | Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Shuichi Yasuda, Tetsuya Hamada | 2016-10-25 |
| 9375748 | Substrate processing apparatus and substrate processing method | Masahiko Harumoto, Tadashi Miyagi, Yukihiko Inagaki | 2016-06-28 |
| 9064914 | Method of and apparatus for heat-treating exposed substrate | — | 2015-06-23 |
| 8932672 | Substrate processing apparatus | Masashi Kanaoka, Tadashi Miyagi, Kazuhito Shigemori, Shuichi Yasuda, Tetsuya Hamada | 2015-01-13 |