Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411414 | Peripheral processing method | Mitsuya Kusuhara | 2025-09-09 |
| 12035576 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2024-07-09 |
| 12014940 | Substrate treating system and substrate transporting method | — | 2024-06-18 |
| 11676842 | Substrate treating apparatus | — | 2023-06-13 |
| 11590540 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2023-02-28 |
| 11443968 | Substrate treating apparatus and substrate transporting method | — | 2022-09-13 |
| 11348812 | Substrate treating apparatus and substrate transporting method | — | 2022-05-31 |
| 11339011 | Substrate treating system and substrate transporting method | — | 2022-05-24 |
| 11302543 | Substrate carrier apparatus and substrate carrying method | — | 2022-04-12 |
| 11295974 | Substrate treating apparatus | — | 2022-04-05 |
| 11260429 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2022-03-01 |
| 11251060 | Substrate treating apparatus, carrier transporting method, and carrier buffer device | — | 2022-02-15 |
| 11231651 | Peripheral processing apparatus and peripheral processing method | Mitsuya Kusuhara | 2022-01-25 |
| 11152242 | Substrate treating apparatus and method for controlling substrate treating apparatus | Seiji Murai | 2021-10-19 |
| 11152233 | Substrate treating apparatus and substrate treating method | Yukihiko Inagaki, Seiji Murai | 2021-10-19 |
| 11139192 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2021-10-05 |
| 11127613 | Substrate treating apparatus and substrate transporting method | — | 2021-09-21 |
| 11101156 | Substrate treating apparatus | Yukihiko Inagaki, Seiji Murai | 2021-08-24 |
| 11075101 | Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus | Seiji Murai | 2021-07-27 |
| 11037808 | Substrate processing apparatus and substrate processing method | — | 2021-06-15 |
| 10727087 | Substrate transporting device, substrate treating apparatus, and substrate transporting method | — | 2020-07-28 |
| 10627800 | Substrate transport device, substrate processing apparatus including the substrate transport device, and substrate transport method | — | 2020-04-21 |
| 10585362 | Substrate processing apparatus, alignment device, substrate processing method and alignment method | — | 2020-03-10 |
| 10468284 | Substrate processing apparatus and substrate processing method | — | 2019-11-05 |
| 10395968 | Substrate transport device, detection position calibration method and substrate processing apparatus | — | 2019-08-27 |