Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10186441 | Substrate processing apparatus and substrate processing method | — | 2019-01-22 |
| 10134609 | Substrate transporting device, substrate treating apparatus, and substrate transporting method | — | 2018-11-20 |
| 10062593 | Substrate processing apparatus and substrate processing method | — | 2018-08-28 |
| 9606454 | Substrate processing apparatus and substrate processing system | Takashi Taguchi | 2017-03-28 |
| 9539607 | Substrate processing apparatus and substrate processing method | Takashi Taguchi, Masahito KASHIYAMA, Kohei Iwasaki | 2017-01-10 |