Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404629 | Treating solution supply apparatus | Junki Nishimura, Hiroyuki Ogura, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2022-08-02 |
| 11358076 | Filter coupling device and substrate treating apparatus provided therewith | Toshiya Kuwahara | 2022-06-14 |
| 11114316 | Substrate treating apparatus | Kota KABUNE, Yasuo Takahashi, Koji Nishiyama, Chiho Harayama | 2021-09-07 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-02-16 |
| 10824074 | Liquid processing apparatus and liquid processing method | — | 2020-11-03 |
| 10818520 | Substrate treating apparatus and substrate treating method | Koji Nishiyama, Kota KABUNE | 2020-10-27 |
| 10790165 | Pump apparatus and substrate treating apparatus | — | 2020-09-29 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Toru Momma, Hiroyuki Ogura, Satoshi Yamamoto, Hiroyuki Takeuchi, Shoji Kirita +2 more | 2020-04-21 |
| 10617983 | Filter coupling device and a substrate treating apparatus having same | Akihiko Morita | 2020-04-14 |
| 10507484 | Pump apparatus and substrate treating apparatus | — | 2019-12-17 |
| 10056270 | Substrate treating apparatus and substrate treating method | Koji Nishiyama, Kota KABUNE | 2018-08-21 |
| 9685363 | Alignment device and substrate processing apparatus | — | 2017-06-20 |
| 9539607 | Substrate processing apparatus and substrate processing method | Joji Kuwahara, Takashi Taguchi, Kohei Iwasaki | 2017-01-10 |
| 9508573 | Substrate processing apparatus and substrate processing method | Shigehiro Goto, Tomohiro Matsuo, Tomohiro Goto | 2016-11-29 |
| 9465293 | Substrate processing apparatus and substrate processing method | Koji Nishiyama | 2016-10-11 |
| 8477301 | Substrate processing apparatus, substrate processing system and inspection/periphery exposure apparatus | Yukihiko Inagaki, Kazuya Akiyama, Noriaki Yokono, Isao Taniguchi | 2013-07-02 |