Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404629 | Treating solution supply apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita +1 more | 2022-08-02 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita +1 more | 2021-02-16 |
| 10423070 | Substrate treating method | Masashi Kanaoka, Masanori IMAMURA, Taiji Matsu, Atsushi Tanaka, Kazuhiro Tadokoro +3 more | 2019-09-24 |
| 10144033 | Substrate processing apparatus and substrate processing method | Masanori IMAMURA, Masashi Kanaoka, Yoshinori Tawaratani, Masaaki Furukawa | 2018-12-04 |
| 8580340 | Substrate processing apparatus and substrate processing method | Masanori IMAMURA, Akihiro Hisai | 2013-11-12 |