Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11941105 | Maintenance device and maintenance method for substrate processing apparatus | Shinichi Ogasawara | 2024-03-26 |
| 11404629 | Treating solution supply apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Hidetoshi Sagawa +1 more | 2022-08-02 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Hidetoshi Sagawa +1 more | 2021-02-16 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Toru Momma, Hiroyuki Ogura, Masahito KASHIYAMA, Satoshi Yamamoto, Hiroyuki Takeuchi +2 more | 2020-04-21 |