Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404629 | Treating solution supply apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Shoji Kirita, Hidetoshi Sagawa +1 more | 2022-08-02 |
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2021-12-21 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-02-16 |
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2020-06-02 |
| 10651056 | Treating liquid vaporizing apparatus | Atsushi Tanaka, Yukihiko Inagaki, Koji Nishi, Shigehiro Goto | 2020-05-12 |
| 10629463 | Thermal processing apparatus and thermal processing method | Yasuhiro Fukumoto, Koji Nishi, Shigehiro Goto, Kenichiro Jo, Atsushi Tanaka | 2020-04-21 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Hiroyuki Ogura, Masahito KASHIYAMA, Satoshi Yamamoto, Hiroyuki Takeuchi, Shoji Kirita +2 more | 2020-04-21 |
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2019-06-25 |
| 10236200 | Exposure device and substrate processing apparatus | Tadashi Miyagi, Koji Nishi | 2019-03-19 |
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Shigehiro Goto, Atsushi Tanaka, Kenichiro Jo | 2019-02-26 |
| 9972516 | Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing method | Tadashi Miyagi, Koji Nishi | 2018-05-15 |