Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404629 | Treating solution supply apparatus | Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2022-08-02 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-02-16 |
| 10627836 | Pumping apparatus and substrate treating apparatus | Toru Momma, Hiroyuki Ogura, Masahito KASHIYAMA, Satoshi Yamamoto, Hiroyuki Takeuchi +2 more | 2020-04-21 |