Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629463 | Thermal processing apparatus and thermal processing method | Toru Momma, Yasuhiro Fukumoto, Koji Nishi, Shigehiro Goto, Atsushi Tanaka | 2020-04-21 |
| 10214814 | Substrate treating apparatus and treatment gas supplying nozzle | Yasuhiro Fukumoto, Koji Nishi, Toru Momma, Shigehiro Goto, Atsushi Tanaka | 2019-02-26 |