Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2021-12-21 |
| 10668591 | Substrate cleaning device, substrate processing apparatus and substrate cleaning method | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2020-06-02 |
| 10331049 | Substrate cleaning device and substrate processing apparatus including the same | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2019-06-25 |