Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698315 | Substrate treating method | Chikara Sagae | 2020-06-30 |
| 10600647 | Coating apparatus | Kazuo Morioka | 2020-03-24 |
| 10423070 | Substrate treating method | Masashi Kanaoka, Taiji Matsu, Hidetoshi Sagawa, Atsushi Tanaka, Kazuhiro Tadokoro +3 more | 2019-09-24 |
| 10144033 | Substrate processing apparatus and substrate processing method | Masashi Kanaoka, Hidetoshi Sagawa, Yoshinori Tawaratani, Masaaki Furukawa | 2018-12-04 |
| 9436087 | Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section | Kazuo Morioka, Satoshi Yamamoto, Hideki Shimizu | 2016-09-06 |
| 8580340 | Substrate processing apparatus and substrate processing method | Akihiro Hisai, Hidetoshi Sagawa | 2013-11-12 |