Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581907 | Developing apparatus | Masahiko Harumoto, Akira Yamaguchi, Minoru Sugiyama, Takuya Kuroda | 2017-02-28 |
| 8956695 | Developing method | Masahiko Harumoto, Akira Yamaguchi, Minoru Sugiyama, Takuya Kuroda | 2015-02-17 |
| 8580340 | Substrate processing apparatus and substrate processing method | Masanori IMAMURA, Hidetoshi Sagawa | 2013-11-12 |
| 8496761 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Toru Asano, Hiroshi Kobayashi, Tsuyoshi Okumura, Shuichi Yasuda +3 more | 2013-07-30 |
| 8137576 | Substrate developing method and developing apparatus | Masahiko Harumoto, Akira Yamaguchi | 2012-03-20 |
| 8034190 | Substrate processing apparatus and substrate processing method | Shuichi Yasuda, Masashi Kanaoka, Koji Kaneyama, Tadashi Miyagi, Kasuhito Shigemori +3 more | 2011-10-11 |
| 7726891 | Substrate processing apparatus and substrate processing method | Koji Kaneyama, Toru Asano, Hiroshi Kobayashi | 2010-06-01 |
| 7017658 | Heat processing device | Junichi Yoshida | 2006-03-28 |
| 6913781 | Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating | Koji Kaneyama | 2005-07-05 |
| 6736206 | Thermal processor | — | 2004-05-18 |
| 6080969 | Apparatus for and method of thermally processing substrate | Hiroyasu Goto, Minobu Matsunaga, Hiroshi Kobayashi | 2000-06-27 |
| 5927077 | Processing system hot plate construction substrate | Minobu Matsunaga, Hiroshi Kobayashi | 1999-07-27 |
| 5514215 | Treating liquid supplying apparatus for a substrate spin treating apparatus | Kazuhisa Takamatsu, Hiroshi Kato, Masami Ohtani | 1996-05-07 |