Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8127713 | Multi-channel developer system | Eric Bramwell Britcher, Yevgeniy Rabinovich, Svetlana Sherman | 2012-03-06 |
| 8031324 | Substrate processing apparatus with integrated cleaning unit | Yoshiteru Fukutomi | 2011-10-04 |
| 6896466 | Substrate processing apparatus | Joichi Nishimura, Yasuhiko Hashimoto | 2005-05-24 |
| 6790286 | Substrate processing apparatus | Joichi Nishimura, Kenji Hashinoki, Masayoshi Shiga, Koji Hashimoto | 2004-09-14 |
| 6790287 | Substrate processing apparatus, substrate inspection method and substrate processing system | Masayoshi Shiga, Kenji Hashinoki, Joichi Nishimura | 2004-09-14 |
| 6688189 | Robot | Yasuhiko Hashimoto, Joichi Nishimura | 2004-02-10 |
| 6371713 | Substrate processing apparatus | Joichi Nishimura, Yasuhiko Hashimoto | 2002-04-16 |
| 6286525 | Substrate cleaning apparatus and method | Joichi Nishimura, Akihiko Morita | 2001-09-11 |
| 6260562 | Substrate cleaning apparatus and method | Kenya Morinishi, Joichi Nishimura, Akihiko Morita | 2001-07-17 |
| 6159291 | Substrate treating apparatus | Akihiko Morita, Joichi Nishimura | 2000-12-12 |
| 6151744 | Method of and apparatus for cleaning substrate | Masahide Ikeda, Mitsuhiro Fujita, Joichi Nishimura | 2000-11-28 |
| 6099643 | Apparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment section | Minobu Matsunaga, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki | 2000-08-08 |
| 6062852 | Substrate heat-treating apparatus | Takanori Kawamoto, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura +1 more | 2000-05-16 |
| 6060697 | Substrate processing apparatus having regulated power consumption and method therefor | Akihiko Morita, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura +4 more | 2000-05-09 |
| 6051101 | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Yasuo Imanishi, Masao Tsuji, Takanori Kawamoto, Masaki Iwami, Joichi Nishimura +1 more | 2000-04-18 |
| 6048400 | Substrate processing apparatus | — | 2000-04-11 |
| 6007629 | Substrate processing apparatus | Tadashi Sasaki | 1999-12-28 |
| 5989342 | Apparatus for substrate holding | Masahide Ikeda | 1999-11-23 |
| 5963753 | Substrate processing apparatus | Minobu Matsunaga, Tutomu Ueyama, Ryuji Kitakado, Kaoru Aoki, Masao Tsuji | 1999-10-05 |
| 5841515 | Substrate container cassette, interface mechanism, and substrate processing | — | 1998-11-24 |
| 5829087 | Substrate spin cleaning apparatus | Joichi Nishimura, Tadashi Sasaki | 1998-11-03 |
| 5785068 | Substrate spin cleaning apparatus | Tadashi Sasaki | 1998-07-28 |
| 5765072 | Treating solution supplying method and substrate treating apparatus | Yoshiteru Fukutomi | 1998-06-09 |
| 5647083 | Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus | Kenji Sugimoto, Nobuyasu Hiraoka, Mitsuhiro Fujita | 1997-07-15 |
| 5514215 | Treating liquid supplying apparatus for a substrate spin treating apparatus | Kazuhisa Takamatsu, Akihiro Hisai, Hiroshi Kato | 1996-05-07 |