Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6062852 | Substrate heat-treating apparatus | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura +1 more | 2000-05-16 |
| 6051101 | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Masaki Iwami, Joichi Nishimura +1 more | 2000-04-18 |
| 5846327 | Substrate spin treating apparatus | Mitsuhiro Fujita | 1998-12-08 |