Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804387 | Substrate processing device and substrate processing method | Daichi Yoshitomi, Kazuki Inoue, Hiroaki Ishii | 2023-10-31 |
| 10998203 | Substrate processing device and substrate processing method | Daichi Yoshitomi, Kazuki Inoue, Hiroaki Ishii | 2021-05-04 |
| 10037902 | Substrate processing device and substrate processing method | Daichi Yoshitomi, Kazuki Inoue, Hiroaki Ishii | 2018-07-31 |
| 7913346 | Substrate treatment apparatus and substrate treatment method | Soichi Nadahara | 2011-03-29 |
| 7311781 | Substrate rotation type treatment apparatus | Kentaro Tokuri, Kenya Morinishi | 2007-12-25 |
| 6062852 | Substrate heat-treating apparatus | Takanori Kawamoto, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Joichi Nishimura +1 more | 2000-05-16 |
| 6060697 | Substrate processing apparatus having regulated power consumption and method therefor | Akihiko Morita, Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Joichi Nishimura +4 more | 2000-05-09 |
| 6051101 | Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus | Masami Ohtani, Yasuo Imanishi, Masao Tsuji, Takanori Kawamoto, Joichi Nishimura +1 more | 2000-04-18 |
| 5762684 | Treating liquid supplying method and apparatus | Toyohide Hayashi | 1998-06-09 |