Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721815 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi | 2017-08-01 |
| 8646469 | Substrate treating apparatus | Hiroyuki Araki | 2014-02-11 |
| 8524009 | Substrate treating method | Hiroyuki Araki | 2013-09-03 |
| 8277569 | Substrate treating apparatus and substrate treating method | Hiroyuki Araki | 2012-10-02 |
| 7311781 | Substrate rotation type treatment apparatus | Kenya Morinishi, Masaki Iwami | 2007-12-25 |