Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217986 | Substrate treating apparatus with parallel first and second parts of substrate treatment lines on multiple stories for simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2025-02-04 |
| 10290521 | Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Yasuo Kawamatsu, Hiromichi Nagashima | 2019-05-14 |
| 9687874 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2017-06-27 |
| 9368383 | Substrate treating apparatus with substrate reordering | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-06-14 |
| 9299596 | Substrate treating apparatus with parallel substrate treatment lines simultaneously treating a plurality of substrates | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-03-29 |
| 9230834 | Substrate treating apparatus | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Yasuo Kawamatsu, Hiromichi Nagashima | 2016-01-05 |
| 9184071 | Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-10 |
| 9174235 | Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment lines | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-11-03 |
| 9165807 | Substrate treating apparatus with vertical treatment arrangement including vertical blowout and exhaust units | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Yasuo Kawamatsu, Hiromichi Nagashima | 2015-10-20 |
| 8851008 | Parallel substrate treatment for a plurality of substrate treatment lines | Yoshiteru Fukutomi, Tsuyoshi Mitsuhashi, Hiroyuki Ogura, Yasuo Kawamatsu, Hiromichi Nagashima | 2014-10-07 |
| 8708587 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yasuo Kawamatsu, Yoshiteru Fukutomi, Hiromichi Nagashima | 2014-04-29 |
| 8545118 | Substrate treating apparatus with inter-unit buffers | Hiroyuki Ogura, Tsuyoshi Mitsuhashi, Yoshiteru Fukutomi, Yasuo Kawamatsu, Hiromichi Nagashima | 2013-10-01 |
| 7531039 | Substrate processing apparatus and substrate processing system | Masanobu Sato | 2009-05-12 |
| 7479205 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2009-01-20 |
| 7428907 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2008-09-30 |
| 7311781 | Substrate rotation type treatment apparatus | Kentaro Tokuri, Masaki Iwami | 2007-12-25 |
| 7267130 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2007-09-11 |
| 6951221 | Substrate processing apparatus | Seiichiro Okuda, Hiroaki Sugimoto, Takuya Kuroda, Masanobu Sato, Sadao Hirae +2 more | 2005-10-04 |
| 6901938 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Shuichi Yasuda | 2005-06-07 |
| 6705331 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Shuichi Yasuda | 2004-03-16 |
| 6260562 | Substrate cleaning apparatus and method | Masami Ohtani, Joichi Nishimura, Akihiko Morita | 2001-07-17 |
| 5975098 | Apparatus for and method of cleaning substrate | Mitsuaki Yoshitani, Kazuo Kinose, Satoru Tanaka, Masahiro Miyagi, Naoshige Itami +1 more | 1999-11-02 |