Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6021790 | Substrate treating apparatus and method for treating substrate | Eiichi Wada, Makoto Mori, Iwao Tanaka, Yoshihiko Matsushita | 2000-02-08 |
| 5975098 | Apparatus for and method of cleaning substrate | Kazuo Kinose, Satoru Tanaka, Kenya Morinishi, Masahiro Miyagi, Naoshige Itami +1 more | 1999-11-02 |
| 5904169 | Apparatus for and method of treating substrate | — | 1999-05-18 |
| 5881750 | Substrate treating apparatus | — | 1999-03-16 |
| 5762749 | Apparatus for removing liquid from substrates | Satoshi Suzuki, Yoshio Matsumura, Yasuhiro Akita, Hiroshi Yamamoto | 1998-06-09 |