Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761422 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Hiroyuki Araki, Masanori Suzuki, Tomokatsu Sato, Nobuo Kawase | 2020-09-01 |
| 10629459 | Substrate processing apparatus | Masanobu Sato, Hiroyuki Araki | 2020-04-21 |
| 10468273 | Substrate processing method | Masanobu Sato, Hiroyuki Araki | 2019-11-05 |
| 10133173 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Hiroyuki Araki, Masanori Suzuki, Tomokatsu Sato, Nobuo Kawase | 2018-11-20 |
| 9997378 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2018-06-12 |
| 9972515 | Substrate processing apparatus and substrate processing method | Kenichiro Arai | 2018-05-15 |
| 9852931 | Substrate processing apparatus | Masanobu Sato, Hiroyuki Araki | 2017-12-26 |
| 9713822 | Substrate processing apparatus | Koji Hashimoto, Toru Endo | 2017-07-25 |
| 9640382 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2017-05-02 |
| 9601357 | Substrate processing device and substrate processing method | Koji Hashimoto, Mitsukazu Takahashi | 2017-03-21 |
| 9576808 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2017-02-21 |
| 9396974 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Toru Endo, Koji Hashimoto | 2016-07-19 |
| 9165798 | Substrate processing apparatus and substrate processing method | — | 2015-10-20 |
| 9142433 | Substrate processing apparatus and substrate processing method | Kazunori Fujikawa | 2015-09-22 |
| 8883030 | Substrate processing apparatus and substrate processing method | Koji Hashimoto, Toru Endo | 2014-11-11 |
| 8815048 | Substrate processing apparatus and substrate processing method | Masanobu Sato, Hiroyuki Araki | 2014-08-26 |
| 7958899 | Substrate cleaning apparatus and substrate cleaning method | Takayoshi Tanaka | 2011-06-14 |
| 7169269 | Plating apparatus, plating cup and cathode ring | Yasuhiro Mizohata, Hideaki Matsubara, Ryuichi Hayama | 2007-01-30 |
| 5975098 | Apparatus for and method of cleaning substrate | Mitsuaki Yoshitani, Kazuo Kinose, Satoru Tanaka, Kenya Morinishi, Naoshige Itami +1 more | 1999-11-02 |
| 5763892 | Ultraviolet irradiator for substrate, substrate treatment system, and method of irradiating substrate with ultraviolet light | Koji Kizaki, Katsunaga Narita | 1998-06-09 |
| 4898232 | Heat exchanger and process for producing the same | Izumi Ochiai, Yoshio Nozawa, Yukio Kitayama | 1990-02-06 |
| 4698904 | Apparatus for assembling fins and tubes for heat exchangers | Yoshio Nozawa, Izumi Ochiai, Yukio Kitayama, Katsuharu Uehara, Takahiko Deguchi +3 more | 1987-10-13 |
| 4597171 | Tube-enlarging press for use in heat exchanger fabrication | Yukio Kitayama, Izumi Ochiai, Yoshio Nozawa, Tadaaki Ayabe, Katsuharu Uehara | 1986-07-01 |
| 4593756 | Fin-and-tube type heat exchanger | Masaaki Itoh, Hiroshi Kogure, Kenji Iino, Izumi Ochiai, Yukio Kitayama | 1986-06-10 |
| 4566359 | Method of stacking fins of heat exchangers | Katsuharu Uehara, Yoshio Nozawa, Takahiko Deguchi | 1986-01-28 |