Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761422 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Masahiro Miyagi, Hiroyuki Araki, Masanori Suzuki, Nobuo Kawase | 2020-09-01 |
| 10133173 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Masahiro Miyagi, Hiroyuki Araki, Masanori Suzuki, Nobuo Kawase | 2018-11-20 |
| 7397647 | Ionized gas current emission type dust-free ionizer | Akira Mizuno, Akio Sugita, Masanori Suzuki, Toshihiko Hino, Haruyuki Togari | 2008-07-08 |
| 7126807 | Ionized air flow discharge type non-dusting ionizer | Akira Mizuno, Akio Sugita, Masanori Suzuki, Toshihiko Hino, Haruyuki Togari | 2006-10-24 |