Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761422 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Masahiro Miyagi, Hiroyuki Araki, Masanori Suzuki, Tomokatsu Sato | 2020-09-01 |
| 10133173 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Masahiro Miyagi, Hiroyuki Araki, Masanori Suzuki, Tomokatsu Sato | 2018-11-20 |
| 8871640 | Method of manufacturing semiconductor chip | Takao Yonehara, Kiyofumi Sakaguchi, Kenji Nakagawa | 2014-10-28 |
| 8647923 | Method of manufacturing semiconductor device | Kiyofumi Sakaguchi, Takao Yonehara, Kenji Nakagawa | 2014-02-11 |
| 7961283 | Manufacturing method of liquid crystal panel and deuterium, hydrogen deuteride, or tritium treatment of alignment film | Akira Sakai | 2011-06-14 |
| 7777848 | Manufacturing method of liquid crystal panel and deuterium oxide surface treatment method of alignment film | Akira Sakai | 2010-08-17 |
| 7604928 | Patterning method and methods for producing electro-optic device, color filter, illuminant, and thin-film transistor | Osamu Iketa, Keishi Saito, Takeo Ono | 2009-10-20 |
| 7579287 | Surface treatment method, manufacturing method of semiconductor device, and manufacturing method of capacitive element | Shigenori Ishihara | 2009-08-25 |
| 7005081 | Base material cutting method, base material cutting apparatus, ingot cutting method, ingot cutting apparatus and wafer producing method | Masakatsu Ohta, Nobuyoshi Tanaka | 2006-02-28 |
| 4597459 | Weight detecting type sensor | Yoshiki Iwata, Yoshinori Tanaka, Takashi Miyake, Hiroshi Kawaura | 1986-07-01 |
| 4382776 | Quartz tube for thermal processing of semiconductor substrates | Masayoshi Aigo | 1983-05-10 |