Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615012 | Sputtering apparatus and substrate processing apparatus | Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2020-04-07 |
| 10062551 | Sputtering apparatus and substrate processing apparatus | Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Hiroyuki Toya, Yasushi Yasumatsu, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2018-06-12 |
| 9966241 | Sputtering apparatus | — | 2018-05-08 |
| 9952498 | Mask blank, and transfer mask | Toshiyuki Suzuki | 2018-04-24 |
| 9627187 | Sputtering apparatus | — | 2017-04-18 |
| 9502223 | Sputtering apparatus, target and shield | — | 2016-11-22 |
| 9470970 | Mask blank, transfer mask, and methods of manufacturing the same | Toshiyuki Suzuki | 2016-10-18 |
| 9175377 | Film forming apparatus and film forming method | — | 2015-11-03 |
| 8298627 | Method and apparatus of plasma treatment | Takashi Minami | 2012-10-30 |
| 7601468 | Process for manufacturing half-tone phase shifting mask blanks | Masaru Mitsui, Toshiyuki Suzuki | 2009-10-13 |
| 7579287 | Surface treatment method, manufacturing method of semiconductor device, and manufacturing method of capacitive element | Nobuo Kawase | 2009-08-25 |
| 7141339 | Process for manufacturing half-tone phase shifting mask blanks | Masaru Mitsui, Toshiyuki Suzuki | 2006-11-28 |
| 7026077 | Photomask blank manufacturing method | Masaru Mitsui, Toshiyuki Suzuki | 2006-04-11 |