Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119203 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2024-10-15 |
| 11694882 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Kento Norota, Naoyuki Okamoto, Yasuo Kato | 2023-07-04 |
| 11508545 | Grid assembly and ion beam etching apparatus | Masashi Tsujiyama, Kaori Motochi | 2022-11-22 |
| 11355314 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2022-06-07 |
| 11270873 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Kento Norota, Naoyuki Okamoto, Yasuo Kato | 2022-03-08 |
| 10879040 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2020-12-29 |
| 10615012 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2020-04-07 |
| 10224179 | Ion beam processing apparatus, electrode assembly, and method of cleaning electrode assembly | Naoyuki Okamoto, Masashi Tsujiyama, Fumihito Suzuki | 2019-03-05 |
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yuu Fujimoto +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Toshikazu Nakazawa, Eiji Nakamura, Shintaro Suda +2 more | 2018-06-12 |
| 9721747 | Grid, method of manufacturing the same, and ion beam processing apparatus | Masashi Tsujiyama, Yukito Nakagawa | 2017-08-01 |
| 9583304 | Processing apparatus and shield | — | 2017-02-28 |
| 9422619 | Processing apparatus and shield | — | 2016-08-23 |
| 9322094 | Film-forming apparatus | Yuji Kajihara, Kazuya Konaga | 2016-04-26 |
| 9322095 | Film-forming apparatus | Yuji Kajihara, Kazuya Konaga | 2016-04-26 |
| 9109285 | Film-forming apparatus | Yuji Kajihara, Kazuya Konaga | 2015-08-18 |