Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu, Yuu Fujimoto +3 more | 2018-08-28 |
| 9322094 | Film-forming apparatus | Yuji Kajihara, Yasushi Yasumatsu | 2016-04-26 |
| 9322095 | Film-forming apparatus | Yuji Kajihara, Yasushi Yasumatsu | 2016-04-26 |
| 9109285 | Film-forming apparatus | Yuji Kajihara, Yasushi Yasumatsu | 2015-08-18 |
| 8303785 | Plasma processing apparatus and electronic device manufacturing method | Yoh Tanaka, Eisaku Watanabe, Eitaro Morimoto | 2012-11-06 |