Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8835296 | Electronic component manufacturing method including step of embedding metal film | Shunichi Wakayanagi, Takayuki Saito, Takuya Seino, Akira Matsuo, Koji Yamazaki +3 more | 2014-09-16 |
| 8481382 | Method and apparatus for manufacturing semiconductor device | Naomu Kitano, Takuya Seino, Akira Matsuo, Yu Sato | 2013-07-09 |
| 8303785 | Plasma processing apparatus and electronic device manufacturing method | Yoh Tanaka, Kazuya Konaga, Eisaku Watanabe | 2012-11-06 |