Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9885107 | Method for continuously forming noble metal film and method for continuously manufacturing electronic component | Shunichi Wakayanagi | 2018-02-06 |
| 8778145 | Magnetic field control for uniform film thickness distribution in sputter apparatus | Tetsuro Ogata | 2014-07-15 |
| 8303785 | Plasma processing apparatus and electronic device manufacturing method | Yoh Tanaka, Kazuya Konaga, Eitaro Morimoto | 2012-11-06 |
| 8278211 | Thin film forming method | Hanako Hirayama | 2012-10-02 |
| 8278212 | Method for manufacturing semiconductor memory element and sputtering apparatus | Tetsuro Ogata, Franck Ernult | 2012-10-02 |