Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694882 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Naoyuki Okamoto, Yasuo Kato, Yasushi Yasumatsu | 2023-07-04 |
| 11270873 | Substrate processing apparatus and substrate processing method | Yuji Takanami, Naoyuki Okamoto, Yasuo Kato, Yasushi Yasumatsu | 2022-03-08 |