Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615012 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Eiji Nakamura, Shintaro Suda +2 more | 2020-04-07 |
| 10062551 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Kazuya Konaga, Hiroyuki Toya, Shintaro Suda, Yasushi Yasumatsu +3 more | 2018-08-28 |
| 9997339 | Sputtering apparatus and substrate processing apparatus | Shigenori Ishihara, Hiroyuki Toya, Yasushi Yasumatsu, Eiji Nakamura, Shintaro Suda +2 more | 2018-06-12 |
| 9822450 | Substrate processing apparatus | Norihito Tsukamoto, Keisuke Ueda, Eiji Ozaki | 2017-11-21 |
| 9607868 | Substrate heat treatment apparatus | Takuji Okada, Naoyuki Suzuki | 2017-03-28 |
| 9245785 | Substrate processing apparatus | Yukihito Tashiro | 2016-01-26 |
| 9194038 | Thin film forming apparatus, thin film forming method, and shield component | Akihiro Egami, Katsuhiro Suzuki, Shinya Hasegawa | 2015-11-24 |
| 9127355 | Substrate processing apparatus | Norihito Tsukamoto, Keisuke Ueda, Eiji Ozaki | 2015-09-08 |