Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9822450 | Substrate processing apparatus | Toshikazu Nakazawa, Keisuke Ueda, Eiji Ozaki | 2017-11-21 |
| 9127355 | Substrate processing apparatus | Toshikazu Nakazawa, Keisuke Ueda, Eiji Ozaki | 2015-09-08 |