Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607868 | Substrate heat treatment apparatus | Toshikazu Nakazawa, Naoyuki Suzuki | 2017-03-28 |
| 7976716 | Semiconductor device manufacturing method | Yasumi Sago, Masayoshi Ikeda, Kazuaki Kaneko | 2011-07-12 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Masayoshi Ikeda, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2011-03-01 |
| 7513063 | Substrate processing apparatus | Yasumi Sago, Masayoshi Ikeda, Kazuaki Kaneko | 2009-04-07 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Masayoshi Ikeda, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2007-05-22 |
| 7175737 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Masayoshi Ikeda | 2007-02-13 |
| 4929501 | Thermal transfer medium | Kunio Murakami | 1990-05-29 |