Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462850 | Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater | Satoshi Hirano, Junichi Miyahara, Toshihiko Hanamachi | 2019-10-29 |
| 10276410 | Substrate support device | Junichi Miyahara, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |
| 9414441 | Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit | Gou Takahara, Junichi Miyahara | 2016-08-09 |
| RE43837 | Substrate supporting apparatus | Naoya Kida, Jun Futakuchiya | 2012-12-04 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Tadashi Inokuchi +1 more | 2011-03-01 |
| 7851728 | Heater unit | Jun Futakuchiya | 2010-12-14 |
| 7503980 | Substrate supporting apparatus | Naoya Kida, Jun Futakuchiya | 2009-03-17 |
| 7372001 | Ceramics heater | Junichi Miyahara, Toshihiko Hanamachi | 2008-05-13 |
| 7241346 | Apparatus for vapor deposition | Toshihiko Hanamachi | 2007-07-10 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Tadashi Inokuchi +1 more | 2007-05-22 |
| 7045747 | Heater unit | Jun Futakuchiya | 2006-05-16 |
| 6376808 | Heating apparatus | Toshihiko Hanamachi | 2002-04-23 |
| 5092568 | Coil spring device | Toshio Hamano | 1992-03-03 |