Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10462850 | Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater | Satoshi Hirano, Toshihiro Tachikawa, Toshihiko Hanamachi | 2019-10-29 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |
| 9414441 | Shaft-equipped heater unit and method for manufacturing shaft-equipped heater unit | Gou Takahara, Toshihiro Tachikawa | 2016-08-09 |
| 9153463 | Substrate support device | Jun Futakuchiya, Daisuke Hashimoto | 2015-10-06 |
| 7372001 | Ceramics heater | Toshihiro Tachikawa, Toshihiko Hanamachi | 2008-05-13 |