Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Toshihiko Hanamachi, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |