Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354901 | Stage and manufacturing method thereof | Hibiki YOKOYAMA, Naoya Kida, Noriyoshi Kaneda, Michiyoshi SONE | 2025-07-08 |
| 10315388 | Method of manufacturing laminate and laminate | Satoshi Hirano, Yasuaki Ishioka, Naoki Ito, Yohei Itami | 2019-06-11 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Toshihiko Hanamachi, Go Takahara +1 more | 2019-04-30 |
| 9153463 | Substrate support device | Junichi Miyahara, Daisuke Hashimoto | 2015-10-06 |
| RE43837 | Substrate supporting apparatus | Naoya Kida, Toshihiro Tachikawa | 2012-12-04 |
| 7851728 | Heater unit | Toshihiro Tachikawa | 2010-12-14 |
| 7503980 | Substrate supporting apparatus | Naoya Kida, Toshihiro Tachikawa | 2009-03-17 |
| 7045747 | Heater unit | Toshihiro Tachikawa | 2006-05-16 |
| 6204486 | Heater unit for semiconductor processing | Takashi Masaki, Kenzo Yasuda, Hidenori Ishiwata, Shinji Saito, Shinya Miyaji +2 more | 2001-03-20 |
| 6180931 | Heater unit for semiconductor processing | Takashi Masaki, Shinya Miyaji, Hidenori Ishiwata | 2001-01-30 |