Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12338852 | Joined body | Masaru Takimoto, Junichi Nakayama | 2025-06-24 |
| 12284731 | Heater and stage having the heater | Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-04-22 |
| 12247296 | Member for plasma processing device | Shuhei Morota, Go Takahara, Masaru Takimoto, Hibiki YOKOYAMA, Hiroshi Mitsuda +2 more | 2025-03-11 |
| 12211710 | Stage, film-forming apparatus, and film-processing apparatus | Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-01-28 |
| 11490464 | Heater unit | Kenji Sekiya, Go Takahara, Naoya Aikawa, Yuta Kisara, Arata Tatsumi | 2022-11-01 |
| 11477858 | Sheath heater | Kenji Sekiya, Daisuke Hashimoto, Satoshi Hirano, Masaru Takimoto, Go Takahara +5 more | 2022-10-18 |
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Go Takahara, Arata Tatsumi | 2021-12-14 |
| 10462850 | Method of manufacturing ceramic sintered body, ceramic sintered body, and ceramic heater | Satoshi Hirano, Toshihiro Tachikawa, Junichi Miyahara | 2019-10-29 |
| 10290529 | Heater unit | Naoya Aikawa | 2019-05-14 |
| 10279441 | Method of manufacturing plate with passage, plate with passage, temperature adjustment plate, cold plate, and shower plate | — | 2019-05-07 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Go Takahara, Jun Futakuchiya +1 more | 2019-04-30 |
| 9551071 | Substrate support device | Daisuke Hashimoto, Yasuaki Ishioka | 2017-01-24 |
| 9162251 | Lamination and method for manufacturing lamination | Satoshi Hirano, Yuichiro Yamauchi, Masaru Akabayashi | 2015-10-20 |
| 7372001 | Ceramics heater | Toshihiro Tachikawa, Junichi Miyahara | 2008-05-13 |
| 7241346 | Apparatus for vapor deposition | Toshihiro Tachikawa | 2007-07-10 |
| 6687113 | Electrostatic chuck | Shinji Saito, Takashi Kayamoto | 2004-02-03 |
| 6535371 | Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly | Takashi Kayamoto, Tadashi Inokuchi, Ryusuke Adachi | 2003-03-18 |
| 6376808 | Heating apparatus | Toshihiro Tachikawa | 2002-04-23 |
| 6159301 | Substrate holding apparatus for processing semiconductor | Kiyoshi Sato, Mikio Shimizu, Shinya Miyaji | 2000-12-12 |