Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424421 | Apparatus and method for controlling a substrate temperature | Naoya Kida, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa | 2025-09-23 |
| 12284731 | Heater and stage having the heater | Toshihiko Hanamachi, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa | 2025-04-22 |
| 12211710 | Stage, film-forming apparatus, and film-processing apparatus | Toshihiko Hanamachi, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa | 2025-01-28 |
| 12000737 | Temperature sensor and heater unit | Naoya Kida, Arata Tatsumi, Kenji Sekiya, Naoya Aikawa | 2024-06-04 |