Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424421 | Apparatus and method for controlling a substrate temperature | Naoya Kida, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-09-23 |
| 12284731 | Heater and stage having the heater | Toshihiko Hanamachi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-04-22 |
| 12211710 | Stage, film-forming apparatus, and film-processing apparatus | Toshihiko Hanamachi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-01-28 |
| 12000737 | Temperature sensor and heater unit | Naoya Kida, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2024-06-04 |
| 11490464 | Heater unit | Toshihiko Hanamachi, Kenji Sekiya, Go Takahara, Naoya Aikawa, Yuta Kisara | 2022-11-01 |
| 11477858 | Sheath heater | Toshihiko Hanamachi, Kenji Sekiya, Daisuke Hashimoto, Satoshi Hirano, Masaru Takimoto +5 more | 2022-10-18 |
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Go Takahara, Toshihiko Hanamachi | 2021-12-14 |
| 11052455 | Caulking jig and manufacturing method using same | Satoshi Hirano, Takatoshi Nanbu | 2021-07-06 |