Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424421 | Apparatus and method for controlling a substrate temperature | Naoya Kida, Arata Tatsumi, Naoya Aikawa, Masaya Takanashi | 2025-09-23 |
| 12284731 | Heater and stage having the heater | Toshihiko Hanamachi, Arata Tatsumi, Naoya Aikawa, Masaya Takanashi | 2025-04-22 |
| 12211710 | Stage, film-forming apparatus, and film-processing apparatus | Toshihiko Hanamachi, Arata Tatsumi, Naoya Aikawa, Masaya Takanashi | 2025-01-28 |
| 12000737 | Temperature sensor and heater unit | Naoya Kida, Arata Tatsumi, Naoya Aikawa, Masaya Takanashi | 2024-06-04 |
| 11490464 | Heater unit | Toshihiko Hanamachi, Go Takahara, Naoya Aikawa, Yuta Kisara, Arata Tatsumi | 2022-11-01 |
| 11477858 | Sheath heater | Toshihiko Hanamachi, Daisuke Hashimoto, Satoshi Hirano, Masaru Takimoto, Go Takahara +5 more | 2022-10-18 |