Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424421 | Apparatus and method for controlling a substrate temperature | Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2025-09-23 |
| 12354901 | Stage and manufacturing method thereof | Hibiki YOKOYAMA, Jun Futakuchiya, Noriyoshi Kaneda, Michiyoshi SONE | 2025-07-08 |
| 12000737 | Temperature sensor and heater unit | Arata Tatsumi, Kenji Sekiya, Naoya Aikawa, Masaya Takanashi | 2024-06-04 |
| RE43837 | Substrate supporting apparatus | Toshihiro Tachikawa, Jun Futakuchiya | 2012-12-04 |
| 7503980 | Substrate supporting apparatus | Toshihiro Tachikawa, Jun Futakuchiya | 2009-03-17 |