Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12247296 | Member for plasma processing device | Toshihiko Hanamachi, Shuhei Morota, Masaru Takimoto, Hibiki YOKOYAMA, Hiroshi Mitsuda +2 more | 2025-03-11 |
| 11490464 | Heater unit | Toshihiko Hanamachi, Kenji Sekiya, Naoya Aikawa, Yuta Kisara, Arata Tatsumi | 2022-11-01 |
| 11477858 | Sheath heater | Toshihiko Hanamachi, Kenji Sekiya, Daisuke Hashimoto, Satoshi Hirano, Masaru Takimoto +5 more | 2022-10-18 |
| 11201040 | Substrate supporting unit and film forming device having the substrate supporting unit | Toshihiko Hanamachi, Arata Tatsumi | 2021-12-14 |
| 10276410 | Substrate support device | Toshihiro Tachikawa, Junichi Miyahara, Kazuhiro Yonekura, Toshihiko Hanamachi, Jun Futakuchiya +1 more | 2019-04-30 |