Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9556524 | Temperature regulator, cooling device, and method for manufacturing temperature regulator | Gou Takahara | 2017-01-31 |
| 9524888 | Stage heater and method of manufacturing shaft | Satoshi Hirano | 2016-12-20 |
| 9070487 | Conductive member | Shinji Saito, Yuichiro Yamauchi | 2015-06-30 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa +1 more | 2011-03-01 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa +1 more | 2007-05-22 |
| 6687113 | Electrostatic chuck | Shinji Saito, Toshihiko Hanamachi | 2004-02-03 |
| 6535371 | Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly | Toshihiko Hanamachi, Tadashi Inokuchi, Ryusuke Adachi | 2003-03-18 |
| 6074604 | Brazing material for stainless steel | Shinji Saito | 2000-06-13 |