Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9844126 | Plasma treatment apparatus | Masayoshi Ikeda, Kiyotaka Sakamoto, Akihiro Sawada, Masami Hasegawa, Motozo Kurita | 2017-12-12 |
| 8231767 | Magnetic field generating apparatus and plasma processing apparatus | Kazuyuki Iori, Masayoshi Ikeda | 2012-07-31 |
| 8007633 | Surface processing apparatus | Akihiro Egami, Masayoshi Ikeda, Yukito Nakagawa | 2011-08-30 |
| 7976716 | Semiconductor device manufacturing method | Masayoshi Ikeda, Kazuaki Kaneko, Takuji Okada | 2011-07-12 |
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2011-03-01 |
| 7767056 | High-frequency plasma processing apparatus | Masayoshi Ikeda, Nobuaki Tsuchiya, Hisaaki Sato | 2010-08-03 |
| 7615133 | Electrostatic chuck module and cooling system | Noriaki Tateno, Jun Miyaji, Masayoshi Ikeda, Kazuaki Kaneko, Tomio Takamura +3 more | 2009-11-10 |
| 7513063 | Substrate processing apparatus | Masayoshi Ikeda, Kazuaki Kaneko, Takuji Okada | 2009-04-07 |
| 7323081 | High-frequency plasma processing apparatus | Masayoshi Ikeda, Nobuaki Tsuchiya, Hisaaki Sato | 2008-01-29 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa, Tadashi Inokuchi +1 more | 2007-05-22 |
| 7175737 | Electrostatic chucking stage and substrate processing apparatus | Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda | 2007-02-13 |
| 7025855 | Insulation-film etching system | Yoneichi Ogahara, Masanori Miyamae | 2006-04-11 |
| 7011744 | Brine supply unit | Tomio Takamura, Tadashi Hirayama, Yoshiyuki Ikemura, Masahiko Tamaru, Masayoshi Ikeda +3 more | 2006-03-14 |
| 6774570 | RF plasma processing method and RF plasma processing system | Nobuaki Tsuchiya, Masayoshi Ikeda | 2004-08-10 |
| 5530616 | Electrostastic chuck | Tetsuo Kitabayashi, Atsushi Obara, Jun Miyagi, Masami Sasaki | 1996-06-25 |