Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615133 | Electrostatic chuck module and cooling system | Noriaki Tateno, Jun Miyaji, Yasumi Sago, Masayoshi Ikeda, Kazuaki Kaneko +3 more | 2009-11-10 |
| 7011744 | Brine supply unit | Tomio Takamura, Tadashi Hirayama, Yoshiyuki Ikemura, Yasumi Sago, Masayoshi Ikeda +3 more | 2006-03-14 |