Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7615133 | Electrostatic chuck module and cooling system | Jun Miyaji, Yasumi Sago, Masayoshi Ikeda, Kazuaki Kaneko, Tomio Takamura +3 more | 2009-11-10 |
| 7209339 | Electrostatic chuck for an electrically insulative substrate, and a method of using same | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Koh Fuwa, Ken Maehara | 2007-04-24 |
| 7011744 | Brine supply unit | Tomio Takamura, Tadashi Hirayama, Yoshiyuki Ikemura, Masahiko Tamaru, Yasumi Sago +3 more | 2006-03-14 |
| 6768627 | Electrostatic chuck and processing apparatus for insulative substrate | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Koh Fuwa, Ken MAEHIRA | 2004-07-27 |