Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982323 | Conductive thin film manufacturing method | Koh Fuwa, Tomoko Kittaka, Tetsuhiro Ohno, Hirotoshi SAKAUE | 2021-04-20 |
| 10720858 | Attraction device, method for producing attraction device, and vacuum processing device | Kou Fuwa | 2020-07-21 |
| 10568607 | Device, method of manufacturing the device, and method of manufacturing array type of ultrasound probe | Taichi Suzuki, Koh Fuwa, Yasutomo Ohashi, Katsuhiro Fujita, Yoichi Haga +1 more | 2020-02-25 |
| 6781812 | Chuck equipment | Koh Fuwa | 2004-08-24 |
| 6768627 | Electrostatic chuck and processing apparatus for insulative substrate | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa | 2004-07-27 |