Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043401 | Ceramic member | Toshiya Umeki | 2021-06-22 |
| 10840117 | Holding apparatus | Makoto Hino | 2020-11-17 |
| 10679873 | Ceramic heater | Toshiyuki Endo | 2020-06-09 |
| 10453712 | Holding device | Atsushi Tsuchida | 2019-10-22 |
| 7450365 | Electrostatic chuck | Jun Miyaji, Osamu Okamoto | 2008-11-11 |
| D561206 | Electrostatic chuck | — | 2008-02-05 |
| 7248457 | Electrostatic chuck | Jun Miyaji, Osamu Okamoto | 2007-07-24 |
| 7209339 | Electrostatic chuck for an electrically insulative substrate, and a method of using same | Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa, Ken Maehara | 2007-04-24 |
| 6768627 | Electrostatic chuck and processing apparatus for insulative substrate | Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa, Ken MAEHIRA | 2004-07-27 |
| 5530616 | Electrostastic chuck | Atsushi Obara, Jun Miyagi, Yasumi Sago, Masami Sasaki | 1996-06-25 |
| 5384681 | Electrostatic chuck | Toshiya Watanabe | 1995-01-24 |
| 5384682 | Electrostatic chuck | Toshiya Watanabe | 1995-01-24 |
| 5151845 | Electrostatic chuck | Toshiya Watanabe | 1992-09-29 |
| 5117121 | Method of and apparatus for applying voltage to electrostatic chuck | Toshiya Watanabe | 1992-05-26 |
| 5104834 | Dielectric ceramics for electrostatic chucks and method of making them | Toshiya Watanabe, Chiaki Nakayama | 1992-04-14 |