Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7209339 | Electrostatic chuck for an electrically insulative substrate, and a method of using same | Tetsuo Kitabayashi, Hiroaki Hori, Takeshi Uchimura, Noriaki Tateno, Koh Fuwa | 2007-04-24 |