Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7025855 | Insulation-film etching system | Yasumi Sago, Masanori Miyamae | 2006-04-11 |
| 5958265 | Substrate holder for a plasma processing system | — | 1999-09-28 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7025855 | Insulation-film etching system | Yasumi Sago, Masanori Miyamae | 2006-04-11 |
| 5958265 | Substrate holder for a plasma processing system | — | 1999-09-28 |